[Update 28 January 2026]: A temporary resolution has been implemented for the spin coater and profilometer in the PSE423 cleanroom. Both tools will be up and running by 30th January. Further updates will be provided for the nitrogen gun and the mask aligner.

[Update 19 January 2026]: The nitrogen and compressed air are unavailable in PSE423. A replacement air compressor will be installed as a temporary solution. Further notice will be provided once it is ready.

[Update 17 January 2026]: A temporary solution has been implemented and the nitrogen supply is operational.

The nitrogen system is currently shut down for further inspection and maintenance due to a pump issue recently identified. As a result, the spin coater and mask aligner will not operate.

Please notify us, if you have any planned work requiring the nitrogen gun, spin coater or mask aligner after 5 January 2026.

Sorry for the inconvenience.