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NEWS AND UPDATES
N2 and CDA have been restored
The N2 and CDA of the Petrie cleanroom have been restored.
The profilometer is restored.
The issue of the stylus profilometer has been rectified. The profilometer is now up and running. Note, the compressed air is still down, so the air table of the profilometer is not floating right now. This may cause increased measurement noise, which could affect measuring sub-micron structures.
N2 and compressed air of the cleanroom is down.
The N2 supply and compressed air of the cleanroom is down. Affected instruments include the spin coater, wet bench and mask aligner.
The stylus profilometer is down
The stylus profilometer is currently down. Further updates will be provided.
